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Aluminum Oxynitride (Al23O27N5)-Sputtering Target

Aluminum Oxynitride (Al23O27N5)-Sputtering Target

CAS: 12633-97-5
Molecular Formula: Al23O27N5
Purity: 99.995%
Products Code: TR13080700ST
Specification Model: 6 inch dia x 5 mm th.
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Aluminum Oxynitride (Al23O27N5)-Sputtering Target introduce:


Aluminium oxynitride or ALON is a ceramic composed of aluminium, oxygen and nitrogen. It is four times harder than fused silica glass, 85% as hard as sapphire, and nearly 15% harder than magnesium aluminate spinel. Since it has a cubic spinel structure, it can be fabricated to transparent windows, plates, domes, rods, tubes and other forms using conventional ceramic powder processing techniques. ALON is the hardest polycrystalline transparent ceramic available commercially.

Chemical formula:(AlN)x·(Al2O3)1−x,0.30 ≤ x ≤ 0.37

Appearance:White or transparent solid

Density:3.691–3.696 g/cm3

Melting point:~2150 °C

Solubility in water:insoluble 

Refractive index (nD):1.79


In addition to being used as a transparent armor material, ALON is used as infrared-optical windows. As such it has applications as a sensor component, specialty IR domes, windows for laser communications, and in some semiconductor-related applications.
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