Aluminum Oxynitride (Al23O27N5)-Sputtering Target introduce:
Aluminium oxynitride or ALON is a ceramic composed of aluminium, oxygen and nitrogen. It is four times harder than fused silica glass, 85% as hard as sapphire, and nearly 15% harder than magnesium aluminate spinel. Since it has a cubic spinel structure, it can be fabricated to transparent windows, plates, domes, rods, tubes and other forms using conventional ceramic powder processing techniques. ALON is the hardest polycrystalline transparent ceramic available commercially.
Chemical formula：(AlN)x·(Al2O3)1−x,0.30 ≤ x ≤ 0.37
Appearance：White or transparent solid
Melting point：~2150 °C
Solubility in water：insoluble
Refractive index (nD)：1.79
In addition to being used as a transparent armor material, ALON is used as infrared-optical windows. As such it has applications as a sensor component, specialty IR domes, windows for laser communications, and in some semiconductor-related applications.
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